Diameter : 100 nm
Pitch : 300 nm
x_num : 3 / y_num : 3
x_size : 1.558845726812 um / y_size : 0.9 um
>SetStartPoint
{
}
>Circle
{
<Color 0,0,0
<Layer 1
<LineStyle 1,0.0500,0.0000
<PointXYZ 0.0e-003,0.0e-003,0.000000000000000e+000
<PointXYZ 50e-003,0.0e-003,0.000000000000000e+000
<Type 1
}
>Circle
{
<Color 0,0,0
<Layer 1
<LineStyle 1,0.0500,0.0000
<PointXYZ 259.80762113533e-003,150e-003,0.000000000000000e+000
<PointXYZ 309.80762113533e-003,150e-003,0.000000000000000e+000
<Type 1
}
>DragSelect
{
<PointXYZ -359.80762113533e-003,-250e-003,0.000000000000000e+000
<PointXYZ 359.80762113533e-003,250e-003,0.000000000000000e+000
<Type 0
}
>Array
{
<PointXYZ 519.61524227066e-003,0.0e-003,0.000000000000000e+000
<PointXYZ 0.0e-003,300e-003,0.000000000000000e+000
<NCopy 3,3,1
<Type 0
<AlongCurve 0
<Orientation 0
<UseOriginalCopy 1
<SpecifyOffsets 0
}